In this second edition of Extreme Ultraviolet Lithography, coverage is maintained on the fundamental aspects of EUV lithographic technology for topics such as exposure tools, light sources, masks, resists, process control, metrology, and computational lithography. Lithography costs, which have often influenced areas of technical focus, are also ......
Computational optical imaging uses electromagnetic signals in the infrared, visible, ultraviolet, and x-ray wavelength ranges to characterize remote objects. This text explains how to create mathematical forward models describing tomographic, holographic, ptychographic, and photographic imaging systems. It describes image estimation algorithms, ......
Optical Design of Eyewear Displays is the first comprehensive resource dedicated to the optical engineering of modern augmented- and virtual-reality eyewear. It combines the core principles of geometrical and physical optics with practical design insight, showing how theory translates into the function and form of modern eyewear displays. Covering ......
The proper selection of mediums in designing certain photonic components plays an important role in achieving on-demand electromagnetic behavior that can be exploited for on-demand applications. Configuring the medium itself significantly impacts the electromagnetic features of the design as a whole. Engineered mediums can be conceptualized by the ......
With Applications in Optical Wave Propagation and Imaging in Turbulence
The objective of this textbook is twofold-to introduce advanced novel mathematical techniques and then to use them to solve a variety of problems that may arise in various applications. The novel mathematical techniques, covered in Part I of the text, involve the use of generalized hypergeometric functions, including the Meijer G-function. We ......
This book describes the author's experience in the process of moving from child to scientist. Duncan T. Moore calls Greenler an "Ambassador for Science" and writes in the foreword that "he has done more than many Nobel Prize winners to bring the excitement of science and engineering to everyone." This book is a personal account that will be read ......
The early editions of Optical Scattering were dominated by the exploration of the relationship between roughness and scatter from optically smooth surfaces by developing the relationship between the surface statistics and the measured surface scatter in BRDF units. The upper limit roughness for using scatter measurement to calculate surface ......
This book is an outgrowth of a short course that the author has presented for SPIE for the past 25 years or so on the fundamentals of infrared sensing. This field spans several technical disciplines, which can leave the beginner with the "where do I start?" question. The selection of the material included here represents those concepts and ......
Why hand grinding and polishing? In a world of CNC machines, 3D shaping printers and mills, why would anyone need to work by hand? Advanced technologies require inflexible fixturing. Working by hand means your fingers become those fixtures. Intuition is the adaptable program used to reach the specified goal. Hand grinding and polishing is the ......
